With this paper, The brand new lapping slurry and polishing slurry are launched. Along with the deliquescence degree of CLBO is fallen to most affordable. A completely new Doing work technological know-how can also be adopted. Immediately after rough sprucing, the focus of ultra-precision polishing slurry is enhanced properly. So does the extremely-precision sharpening pace, as well as the wiping pace is quicker than the deliquescence velocity. The CLBO crystal area roughness can realize 1nm and continue to keep the surface area top quality well. Access through your establishment

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For instance, The existing concave OC could get replaced by a aircraft mirror which could mitigate the power density within the floor of M1 as well as diamond. Also, making use of higher problems threshold coatings for M1 and diamond would also improve the output ability without any damages. Then, the NIR laser within the 2nd Stokes wavelength may be large sufficient, in addition to its very good beam high-quality, to create the ultimate DUV laser at 193 nm by using a high regular power.

On the other hand, the beam top quality of the greater ability DUV laser would develop into even worse resulting from extra significant thermal and nonlinear outcomes. For this reason, the frequency conversion procedures need to be carefully designed to mitigate the aforementioned consequences. As a result, a significant-electricity DUV laser on the FHG of 1 μm with a very good beam good quality can be received and will be valuable for obtaining the shorter wavelength DUV lasers which include 193 nm by SFG.

Both equally the 1040 nm and 1078 nm laser originate from a single twin-wavelength Yb-doped fiber laser. Each and every laser is amplified by levels here of fiber amplifier and Yb-doped materials amplifier, respectively.

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The event from the 193-nm laser was shown by levels of SFG. As a way to scale the DUV laser power properly, a different strategy from the 193-nm DUV laser era is offered based upon the diamond Raman laser.